Invention Grant
- Patent Title: Superlattice memory having GeTe layer and nitrogen-doped Sb2Te3 layer and memory device having the same
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Application No.: US15457479Application Date: 2017-03-13
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Publication No.: US10283707B2Publication Date: 2019-05-07
- Inventor: Yoshiki Kamata
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2016-205908 20161020
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L29/15

Abstract:
According to one embodiment, a superlattice memory comprises substrate, a first electrode provided on the substrate, a second electrode arranged in opposition to the first electrode, and a superlattice structure part provided between the first electrode and the second electrode, which includes first chalcogen compound layers, second chalcogen compound layers the composition of which is different from the first chalcogen compound, and contains Ge, and third chalcogen compound layers in which one of N, B, C, O, and F is added to the first chalcogen compound, stacked one on another.
Public/Granted literature
- US20180114900A1 SUPERLATTICE MEMORY AND MEMORY DEVICE Public/Granted day:2018-04-26
Information query
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