Invention Grant
- Patent Title: Bonded bodies and acoustic wave devices
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Application No.: US16102209Application Date: 2018-08-13
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Publication No.: US10284169B2Publication Date: 2019-05-07
- Inventor: Masashi Goto , Yudai Uno , Keiichiro Asai , Tomoyoshi Tai
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Nagoya, Aichi
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Nagoya, Aichi
- Agency: Flynn Thiel, P.C.
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H01L41/09 ; H03H9/02 ; H03H9/145 ; H03H9/17 ; H03H3/08 ; H03H9/05

Abstract:
An object is to improve insulation in a bonding layer and to improve a bonding strength of a supporting body and piezoelectric single crystal substrate, in a bonded body having the supporting body made of a polycrystalline material or single crystal material, the piezoelectric single crystal substrate and the bonding layer provided between the supporting body and piezoelectric single crystal substrate, wherein the bonded body includes the supporting body, piezoelectric single crystal substrate and the bonding layer provided between the supporting body and piezoelectric single crystal substrate, and the bonding layer has a composition of Si(1-x)Ox (0.008≤x≤0.408).
Public/Granted literature
- US20190007022A1 BONDED BODIES AND ACOUSTIC WAVE DEVICES Public/Granted day:2019-01-03
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