Invention Grant
- Patent Title: Method of producing a patterned film
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Application No.: US14900116Application Date: 2014-06-19
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Publication No.: US10293543B2Publication Date: 2019-05-21
- Inventor: Takeshi Honma , Toshiki Ito , Shiori Yonezawa , Keiko Chiba , Keiji Yamashita
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2013-133538 20130626; JP2013-247135 20131129; JP2014-109339 20140527
- International Application: PCT/JP2014/003311 WO 20140619
- International Announcement: WO2014/208064 WO 20141231
- Main IPC: B29C59/02
- IPC: B29C59/02 ; C08F2/44 ; C08F2/50 ; C08F220/18 ; G03F7/00 ; H01L21/027 ; H01L21/266 ; B29C59/00 ; C08L33/08 ; B29C33/62 ; C08F222/10 ; B29K33/00 ; B29K105/00

Abstract:
In an imprint method in a condensable gas atmosphere, the force (mold releasing force) required to separate a mold from a resist cured film (mold release) has been large. A photocurable composition for performing imprint in an atmosphere containing a condensable gas includes a component (A) which is a (meth)acrylate monomer; a component (B) which is a photopolymerization initiator; and a component (C) which is a mold releasing agent. The saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 50% by weight or more, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm.
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