Invention Grant
- Patent Title: Exhaust manifold in a CVD reactor
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Application No.: US15091412Application Date: 2016-04-05
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Publication No.: US10294562B2Publication Date: 2019-05-21
- Inventor: Carl Galewski , Stephen Edward Savas , Merim Mukinovic
- Applicant: AIXTRON SE
- Applicant Address: DE Herzogenrath
- Assignee: AIXTRON SE
- Current Assignee: AIXTRON SE
- Current Assignee Address: DE Herzogenrath
- Agency: Ascenda Law Group, PC
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/455 ; C23C16/50 ; H01J37/32

Abstract:
Described herein is an exhaust manifold (1) comprising suction opening (2), a gas extraction chamber (3), an intermediate space (9), a gas collection chamber (5) and a suction line (4). A flow-impeding structure may be present within the intermediate space (9). The flow impeding structure may exert a flow resistance on the gas flow which is greater in a central zone (Z) than in edge zones (R) of the intermediate space (9), causing gas to flow into the suction opening (2) at a substantially uniform gas flow speed across the cross section of the suction opening (2).
Public/Granted literature
- US20170283946A1 EXHAUST MANIFOLD IN A CVD REACTOR Public/Granted day:2017-10-05
Information query
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