Invention Grant
- Patent Title: SiC single crystal sublimation growth method and apparatus
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Application No.: US13255151Application Date: 2010-03-25
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Publication No.: US10294584B2Publication Date: 2019-05-21
- Inventor: Avinash K. Gupta , Ilya Zwieback , Edward Semenas , Marcus L. Getkin , Patrick D. Flynn
- Applicant: Avinash K. Gupta , Ilya Zwieback , Edward Semenas , Marcus L. Getkin , Patrick D. Flynn
- Applicant Address: US PA Saxonburg
- Assignee: II-VI INCORPORATED
- Current Assignee: II-VI INCORPORATED
- Current Assignee Address: US PA Saxonburg
- Agency: The Webb Law Firm
- International Application: PCT/US2010/028636 WO 20100325
- International Announcement: WO2010/111473 WO 20100930
- Main IPC: C30B23/02
- IPC: C30B23/02 ; C30B29/36 ; C30B23/00 ; C30B23/06

Abstract:
A physical vapor transport growth system includes a growth chamber charged with SiC source material and a SiC seed crystal in spaced relation and an envelope that is at least partially gas-permeable disposed in the growth chamber. The envelope separates the growth chamber into a source compartment that includes the SiC source material and a crystallization compartment that includes the SiC seed crystal. The envelope is formed of a material that is reactive to vapor generated during sublimation growth of a SiC single crystal on the SiC seed crystal in the crystallization compartment to produce C-bearing vapor that acts as an additional source of C during the growth of the SiC single crystal on the SiC seed crystal.
Public/Granted literature
- US20120103249A1 SIC SINGLE CRYSTAL SUBLIMATION GROWTH METHOD AND APPARATUS Public/Granted day:2012-05-03
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