Invention Grant
- Patent Title: Method of calibrating interferometer and interferometer using the same
-
Application No.: US15121470Application Date: 2015-02-24
-
Publication No.: US10295328B2Publication Date: 2019-05-21
- Inventor: Akira Takada
- Applicant: Kabushiki Kaisha TOPCON
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha TOPCON
- Current Assignee: Kabushiki Kaisha TOPCON
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2014-034812 20140226
- International Application: PCT/JP2015/055251 WO 20150224
- International Announcement: WO2015/129696 WO 20150903
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A calibration method for improving distortion of a waveform of a point-spread-function without constantly executing feedback control to a wavelength-swept light source is provided. An interference signal is generated by varying voltage to be applied to a light source within one period, the interference signal is sampled at equal time intervals on a time axis, the point-spread-function is obtained through Fourier transform by multiplying by a first window function, and a complex analysis signal including frequency information of light is obtained through inverse Fourier transform by multiplying the point-spread-function by a second window function. After a variation in a frequency of the light relative to a time within one period is obtained at equal time intervals by unwrapping phase information of the complex analysis signal, a correspondence relationship between the variation in the frequency of the light within one period and a variation in voltage within one period is obtained.
Public/Granted literature
- US20160363434A1 METHOD OF CALIBRATING INTERFEROMETER AND INTERFEROMETER USING THE SAME Public/Granted day:2016-12-15
Information query