Invention Grant
- Patent Title: Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object
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Application No.: US14886681Application Date: 2015-10-19
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Publication No.: US10295346B2Publication Date: 2019-05-21
- Inventor: Seiichiro Ogura , Ryuta Nishizawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-219771 20141028; JP2014-219772 20141028
- Main IPC: G01C19/5705
- IPC: G01C19/5705

Abstract:
A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.
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