Invention Grant
- Patent Title: Probe card with temperature control function, inspection apparatus using the same, and inspection method
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Application No.: US15628076Application Date: 2017-06-20
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Publication No.: US10295590B2Publication Date: 2019-05-21
- Inventor: Yuki Saito , Yoshiyuki Fukami , Hidehiro Kiyofuji
- Applicant: KABUSHIKI KAISHA NIHON MICRONICS
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee Address: JP Tokyo
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: JP2016-122268 20160621
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/073

Abstract:
A probe card having uniform temperature distribution under control to a desired temperature is provided, so as to provide an inspection apparatus and an inspection method. The probe card includes a supporting substrate, a wiring layer arranged including a wiring on a main surface of the supporting substrate, a probe arranged on a surface serving as an opposite side to a side of the supporting substrate of the wiring layer so as to be connected to the wiring, and a plurality of heaters. Further, the probe card is virtually divided into heater regions according to a plurality of heater regions arrayed in vertical and horizontal directions in plan view, and at least one of a plurality of heaters is arranged in each of the plurality of heater regions. An inspection apparatus is configured including the probe card, and an object to be inspected is inspected by use of the inspection apparatus.
Public/Granted literature
- US20170363680A1 PROBE CARD WITH TEMPERATURE CONTROL FUNCTION, INSPECTION DEVICE USING THE SAME, AND INSPECTION METHOD Public/Granted day:2017-12-21
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