Invention Grant
- Patent Title: Method and device for testing wafers
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Application No.: US13732782Application Date: 2013-01-02
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Publication No.: US10295591B2Publication Date: 2019-05-21
- Inventor: Takeki Andoh , Hiroshi Kubota
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Ronald O. Neerings; Charles A. Brill; Frank D. Cimino
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R31/28 ; H01L21/00 ; C12Q1/00 ; H05K1/00 ; G01R1/00

Abstract:
Circuits and methods for testing wafers are disclosed herein. An embodiment of a method includes electrically contacting a first probe and a second probe to a wafer. A gas is blown in the areas proximate the first probe and the second probe. An electric potential is then applied between the first probe and the second probe while the gas is being blown.
Public/Granted literature
- US20140184259A1 METHOD AND DEVICE FOR TESTING WAFERS Public/Granted day:2014-07-03
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