Prototype aluminum mold for stampers and method for manufacturing same, stamper and method for manufacturing same, method for manufacturing article, and antireflection article
Abstract:
A prototype aluminum mold for stampers that is used to manufacture stampers having a fine irregular surface structure on the surface thereof and containing aluminum and magnesium, wherein the content of magnesium is 0.1% by mass to 3% by mass, the content of silicon is 100 ppm by mass or less, the total content of elements other than aluminum and magnesium is 500 ppm by mass or less, and the number of magnesium silicide particles having an equivalent diameter of 10 nm or more on the surface of the prototype aluminum mold for stampers is 10/1000 μm2 or less.
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