A semiconductor structure and a method of forming include a first semiconductor die and a first dummy die over a carrier, wherein a thickness of the first semiconductor die is greater than a thickness of the first dummy die, a first molding compound layer over the carrier, the first molding compound layer extending along sidewalls of the first semiconductor die and the first dummy die and a first interconnect structure over the first molding compound layer, wherein the first interconnect structure comprises a first metal feature electrically coupled to the first semiconductor die and the first molding compound layer is formed between the first dummy die and the first metal feature.