Invention Grant
- Patent Title: Workpiece support jig
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Application No.: US15245977Application Date: 2016-08-24
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Publication No.: US10297488B2Publication Date: 2019-05-21
- Inventor: Takeomi Fukuoka
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2015-178418 20150910
- Main IPC: B28D5/00
- IPC: B28D5/00 ; B28D5/02 ; H01L21/683

Abstract:
A workpiece support jig includes a support plate supporting a workpiece on a first surface while covering a support surface of a chuck table with a second surface opposite to the first surface and a retainer plate including an area sufficient to cover the whole of the workpiece and sandwiching the workpiece, held on the first surface of the support plate, between the support plate and itself. The support plate includes a plurality of groove parts corresponding to projected division lines of the supported workpiece and a plurality of through holes formed in chip-holding regions demarcated and divided by the intersecting groove parts. When the workpiece divided by a processing unit into chips is unloaded from the chuck table, the workpiece is unloaded while being sandwiched between the support plate and the retainer plate.
Public/Granted literature
- US20170076971A1 WORKPIECE SUPPORT JIG Public/Granted day:2017-03-16
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