Invention Grant
- Patent Title: Methods of forming a gate structure-to-source/drain conductive contact and the resulting devices
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Application No.: US15670366Application Date: 2017-08-07
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Publication No.: US10297504B2Publication Date: 2019-05-21
- Inventor: Hui Zang , Keith Tabakman , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/283
- IPC: H01L21/283 ; H01L21/311 ; H01L21/768 ; H01L21/8234

Abstract:
Various novel methods of forming a gate-to-source/drain conductive contact structure and the resulting novel device structures are disclosed. One illustrative method disclosed herein includes performing at least one first etching process to form a recess in a gate structure of a gate of a transistor device so as to expose an innermost surface of a portion of a sidewall spacer positioned adjacent a first sidewall of the gate structure and performing at least one second etching process through at least the recess in the gate structure so as to remove at least a portion of the portion of the sidewall spacer with the exposed innermost surface.
Public/Granted literature
- US20190043758A1 METHODS OF FORMING A GATE STRUCTURE-TO-SOURCE/DRAIN CONDUCTIVE CONTACT AND THE RESULTING DEVICES Public/Granted day:2019-02-07
Information query
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