Invention Grant
- Patent Title: Self-aligned vertical field-effect transistor with epitaxially grown bottom and top source drain regions
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Application No.: US15786047Application Date: 2017-10-17
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Publication No.: US10297507B2Publication Date: 2019-05-21
- Inventor: Kangguo Cheng , Shogo Mochizuki , Tenko Yamashita , Chen Zhang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234 ; H01L29/66 ; H01L29/78 ; H01L21/3105 ; H01L21/311 ; H01L29/423

Abstract:
A vertical FET structure includes a bottom source-drain region disposed on a substrate of the first type; a recessed first heterostructure layer disposed on the bottom source-drain region; a first fin disposed on the bottom source-drain region; a dielectric inner spacer disposed on the recessed first heterostructure; an outer spacer disposed on the inner spacer; a high-k and metal gate layer disposed on the outer spacer, the inner spacer, and the channel layer; an interlayer dielectric oxide disposed between the first fin and the outer spacer; a recessed second heterostructure layer disposed on top of the substrate of the first type and high-k and metal gate layer; a dielectric inner spacer disposed on the recessed second heterostructure layer; and a top source-drain region layer disposed on the dielectric inner spacer and recessed second heterostructure layer resulting in the vertical FET. A method for forming the vertical FET is also provided.
Public/Granted literature
- US20190115452A1 SELF-ALIGNED VERTICAL FIELD-EFFECT TRANSISTOR WITH EPITAXIALLY GROWN BOTTOM AND TOP SOURCE DRAIN REGIONS Public/Granted day:2019-04-18
Information query
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