Invention Grant
- Patent Title: Dielectrically isolated semiconductor device and method for manufacturing the same
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Application No.: US14985520Application Date: 2015-12-31
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Publication No.: US10297662B2Publication Date: 2019-05-21
- Inventor: Changjun Zhang , Feng Ji , Ping Wang , Zuyin Chen
- Applicant: Hangzhou Silan Microelectronics Co., Ltd. , Hangzhou Silan Integrated Circuit Co., Ltd.
- Applicant Address: CN Hangzhou CN Hangzhou
- Assignee: HANGZHOU SILAN MICROELECTRONICS CO., LTD.,HANGZHOU SILAN INTEGRATED CIRCUIT CO., LTD.
- Current Assignee: HANGZHOU SILAN MICROELECTRONICS CO., LTD.,HANGZHOU SILAN INTEGRATED CIRCUIT CO., LTD.
- Current Assignee Address: CN Hangzhou CN Hangzhou
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201510980166 20151222
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/06 ; H01L21/225 ; H01L21/3063 ; H01L21/308 ; H01L23/535 ; H01L29/66 ; H01L29/861 ; H01L21/762

Abstract:
The present disclosure relates to a dielectrically isolated semiconductor device and a method for manufacturing the same. The dielectrically isolated semiconductor device includes a semiconductor substrate, a first semiconductor layer above the semiconductor substrate, a second semiconductor layer above the first semiconductor layer, a semiconductor island in the second semiconductor layer, and a first dielectric isolation layer surrounding a bottom and sidewalls of the semiconductor island. The first dielectric isolation layer includes a first portion which is formed from a portion of the first semiconductor layer and extending along the bottom of the semiconductor island, and a second portion which is formed from a portion of the second semiconductor layer and extending along the sidewalls of the semiconductor island. The dielectrically isolated semiconductor devices needs no an SOI wafer and reduces manufacturing cost.
Public/Granted literature
- US20170179227A1 DIELECTRICALLY ISOLATED SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2017-06-22
Information query
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