Invention Grant
- Patent Title: LDMOS power semiconductor device and manufacturing method of the same
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Application No.: US15927646Application Date: 2018-03-21
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Publication No.: US10297677B2Publication Date: 2019-05-21
- Inventor: Antonello Santangelo , Salvatore Cascino , Leonardo Gervasi
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP law Group LLP
- Priority: ITTO2013A0021 20130111
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/088 ; H01L29/417 ; H01L29/08 ; H01L21/265 ; H01L29/40 ; H01L29/78 ; H01L21/8234 ; H01L29/49 ; H01L29/10 ; H01L29/06

Abstract:
Methods are directed to forming an electronic semiconductor device that includes a body having a first side and a second side opposite to one another and including a first structural region facing the second side, and a second structural region extending over the first structural region and facing the first side. A body region extends in the second structural region at the first side. A source region extends inside the body region and a lightly-doped drain region faces the first side of the body. A gate electrode is formed over the body region. A trench dielectric region extends through the second structural region in a first trench conductive region immediately adjacent to the trench dielectric region. A second trench conductive region is in electrical contact with the body region and source region. An electrical contact on the body is in electrical contact with the drain region through the first structural region.
Public/Granted literature
- US20180212042A1 LDMOS POWER SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2018-07-26
Information query
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