Invention Grant
- Patent Title: Semiconductor device including vertical-type field effect transistors and method of fabricating the same
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Application No.: US15821116Application Date: 2017-11-22
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Publication No.: US10297687B2Publication Date: 2019-05-21
- Inventor: Yeoncheol Heo , Sharma Deepak , Kwanyoung Chun
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0160797 20161129
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/10 ; H01L29/78 ; H01L27/092 ; H01L29/06 ; H01L21/8238 ; H01L27/02

Abstract:
A semiconductor device includes a substrate with an upper surface and a lower surface, and first to third active patterns extending from the upper surface of the substrate. The first to third active patterns are arranged adjacent to each other in a first direction. The second active pattern is disposed between the first and third active patterns. The semiconductor device also includes a first gate electrode surrounding side surfaces of the first and second active patterns, and a second gate electrode surrounding side surfaces of the third active pattern. Each of the first to third active patterns includes a first impurity region, a channel region, and a second impurity region.
Public/Granted literature
- US20180151728A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2018-05-31
Information query
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