Invention Grant
- Patent Title: Semiconductor device and method for manufacturing same
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Application No.: US15767699Application Date: 2016-10-13
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Publication No.: US10297694B2Publication Date: 2019-05-21
- Inventor: Kazuatsu Ito
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- Priority: JP2015-202707 20151014
- International Application: PCT/JP2016/080332 WO 20161013
- International Announcement: WO2017/065199 WO 20170420
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/08 ; H01L27/32 ; H01L29/04 ; H01L29/24 ; H01L29/49 ; H01L29/66 ; H01L27/088 ; H01L29/423 ; H01L29/786 ; H01L21/8234

Abstract:
A semiconductor device includes a first thin film transistor (101) on a substrate (10), the first thin film transistor including: a sub-gate electrode (12); a first insulating layer (14) covering the sub-gate electrode; a main gate electrode (16) formed on the first insulating layer; a second insulating layer (18) covering the main gate electrode; an oxide semiconductor layer (20) having a layered structure of a first layer (20A) and a second layer (20B), the second layer having a larger band gap than the first layer; a first source electrode (22); and a first drain electrode (24), wherein as seen from a direction normal to the substrate, the oxide semiconductor layer (20) includes: a gate opposing region (20g) that overlaps the main gate electrode; a source contact region that is in contact with the first source electrode (22); a drain contact region that is in contact with the first drain electrode; and an offset region (30s, 30d) that is provided at least one of between the gate opposing region and the source contact region and between the gate opposing region and the drain contact region, wherein at least a portion of the offset region overlaps the sub-gate electrode (12) with the first insulating layer (14) and the second insulating layer (18) therebetween.
Public/Granted literature
- US20180301566A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-10-18
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