Invention Grant
- Patent Title: System and method for manufacturing a micropillar array
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Application No.: US15523555Application Date: 2015-11-19
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Publication No.: US10297832B2Publication Date: 2019-05-21
- Inventor: Sandeep Unnikrishnan , Rob Jacob Hendriks
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL The Hague
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL The Hague
- Agency: Banner & Witcoff, Ltd.
- Priority: EP14193835 20141119
- International Application: PCT/NL2015/050807 WO 20151119
- International Announcement: WO2016/080831 WO 20160526
- Main IPC: H01M4/70
- IPC: H01M4/70 ; B81C1/00 ; C09D11/52 ; C25D7/00 ; G03F7/00 ; G03F7/004 ; G03F7/09 ; G03F7/095 ; H01M4/04 ; G03F7/20 ; G03F7/36 ; G03F7/40 ; H01M4/02

Abstract:
A system and method for manufacturing a micropillar array (20). A carrier (11) is provided with a layer of metal ink (20i). A high energy light source (14) irradiates the metal ink (20i) via a mask (13) between the carrier (11) and the light source. The mask is configured to pass a cross-section illuminated image of the micropillar array onto the metal ink (20i), thereby causing a patterned sintering of the metal ink (20i) to form a first subsection layer (21) of the micropillar array (20) in the layer of metal ink (20i). A further layer of the metal ink (20i) is applied on top of the first subsection layer (21) of the micropillar array (20) and irradiated via the mask (13) to form a second subsection layer (21) of the micropillar array on top. The process is repeated to achieve high aspect ratio micropillars 20p.
Public/Granted literature
- US20170317356A1 SYSTEM AND METHOD FOR MANUFACTURING A MICROPILLAR ARRAY Public/Granted day:2017-11-02
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