- Patent Title: Bulk acoustic wave resonator and method of manufacturing the same
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Application No.: US15487620Application Date: 2017-04-14
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Publication No.: US10298197B2Publication Date: 2019-05-21
- Inventor: Moon Chul Lee , Jae Chang Lee , Chang Hyun Lim , Tae Hun Lee , Tae Kyung Lee , Tae Yoon Kim
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2016-0102565 20160811
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/047 ; H03H9/54 ; H03H9/56 ; H03H9/17
Abstract:
A bulk acoustic wave resonator includes: a substrate; a cavity forming layer disposed on the substrate so as to form a cavity; a lower electrode disposed on the cavity; a piezoelectric layer disposed on the lower electrode; an upper electrode disposed on the piezoelectric layer; and a temperature compensation layer disposed below the lower electrode and in the cavity portion.
Public/Granted literature
- US20180048281A1 BULK ACOUSTIC FILTER DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-02-15
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