Invention Grant
- Patent Title: Vacuum-processing device and control method therefor, and vacuum soldering device and control method therefor
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Application No.: US15507906Application Date: 2015-08-28
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Publication No.: US10307849B2Publication Date: 2019-06-04
- Inventor: Tomotake Kagaya
- Applicant: Senju Metal Industry Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Senju Metal Industry Co., Ltd.
- Current Assignee: Senju Metal Industry Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2014-178291 20140902
- International Application: PCT/JP2015/074416 WO 20150828
- International Announcement: WO2016/035703 WO 20160310
- Main IPC: B23K1/00
- IPC: B23K1/00 ; B23K1/008 ; H05K3/34 ; F04B37/14 ; F04C25/02 ; F04B49/06 ; F04C18/02 ; H01L23/00 ; F04C28/08 ; F04D19/04 ; F04D27/02 ; B23K101/42 ; F04D17/16 ; F04C18/12

Abstract:
The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in a vacuum environment, an operating part 20 that sets a condition for evacuating the chamber 40, a pump 23 that evacuates the chamber 40, and a control portion 61 that calculates the amount of decrease in the degree of vacuum when evacuating the chamber 40 using a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.
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