Invention Grant
- Patent Title: Carbon thin-film device and method of manufacturing the same
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Application No.: US15089702Application Date: 2016-04-04
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Publication No.: US10309009B2Publication Date: 2019-06-04
- Inventor: Hyungjun Kim , Taejin Choi , Jeong-Gyu Song
- Applicant: Industry-Academic Cooperation Foundation, Yonsei University
- Applicant Address: KR Seoul
- Assignee: Industry-Academic Cooperation Foundation, Yonsei University
- Current Assignee: Industry-Academic Cooperation Foundation, Yonsei University
- Current Assignee Address: KR Seoul
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0048290 20150406
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/02 ; C23C16/26 ; C23C16/455
Abstract:
Disclosed is a carbon thin-film device and method for manufacturing the same. The method includes forming a functional group on a surface of a substrate and functionalizing the substrate, and depositing a carbon thin film through ALD on the substrate in which the functional group is formed.
Public/Granted literature
- US20160289825A1 CARBON THIN-FILM DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-10-06
Information query
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