Invention Grant
- Patent Title: Wafer carrier for reducing contamination from carbon particles and outgassing
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Application No.: US14712741Application Date: 2015-05-14
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Publication No.: US10309012B2Publication Date: 2019-06-04
- Inventor: Yongkee Chae , Jiunn Benjamin Heng , Jianming Fu , Zheng Xu
- Applicant: SolarCity Corporation
- Applicant Address: US CA Palo Alto
- Assignee: Tesla, Inc.
- Current Assignee: Tesla, Inc.
- Current Assignee Address: US CA Palo Alto
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Agent Shun Yao
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/44 ; H01L21/687
Abstract:
A wafer carrier for carrying solar cell wafers during a deposition process is described. The carrier is coated with pyrolytic carbon, silicon carbide, or a ceramic material, and is adapted to receive and support the wafers.
Public/Granted literature
- US20160002774A1 WAFER CARRIER FOR REDUCING CONTAMINATION FROM CARBON PARTICLES AND OUTGASSING Public/Granted day:2016-01-07
Information query
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