Invention Grant
- Patent Title: Method and system for identifying a clean endpoint time for a chamber
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Application No.: US14208688Application Date: 2014-03-13
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Publication No.: US10309013B2Publication Date: 2019-06-04
- Inventor: Ilias Iliopoulos , Shuo Na , Jose Albor
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G06F15/18
- IPC: G06F15/18 ; C23C16/44 ; B08B13/00

Abstract:
Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.
Public/Granted literature
- US20140279750A1 METHOD AND SYSTEM FOR IDENTIFYING A CLEAN ENDPOINT TIME FOR A CHAMBER Public/Granted day:2014-09-18
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