Invention Grant
- Patent Title: Pressure type flowmeter
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Application No.: US15814041Application Date: 2017-11-15
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Publication No.: US10309810B2Publication Date: 2019-06-04
- Inventor: Takehisa Hataita , Hideaki Miyamoto
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Alleman Hall Creasman & Tuttle LLP
- Priority: JP2016-224246 20161117
- Main IPC: G01F1/38
- IPC: G01F1/38 ; G01F1/36 ; G01L9/00 ; G01L15/00 ; G01L13/06

Abstract:
In order to solve a problem occurring in a capacitance type pressure sensor adapted to measure absolute pressure, and thereby reduce error, a pressure type flowmeter includes a fluid resistance part in a flow path through which fluid flows and measures a flow rate by detecting the upstream and downstream pressures of the fluid resistance part. Respective pressure sensors for detecting the upstream and downstream pressures are configured to be gauge pressure sensors. Each of the gauge pressure sensors is a capacitance type pressure sensor adapted to measure gauge pressure by detecting a change in the capacitance between a diaphragm displaceable by pressure and a fixed electrode and has a main body part that supports the fixed electrode and the diaphragm and forms a space between them. Further, the internal space is adapted to communicatively connect to the outside through a communicative connection part.
Public/Granted literature
- US20180136021A1 PRESSURE TYPE FLOWMETER Public/Granted day:2018-05-17
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