Invention Grant
- Patent Title: FET biosensor
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Application No.: US15143262Application Date: 2016-04-29
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Publication No.: US10309925B2Publication Date: 2019-06-04
- Inventor: Nadine Collaert , Voon Yew Thean
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: EP15166077 20150430
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L21/265 ; H01L29/423 ; H01L29/66

Abstract:
The disclosed technology relates generally to semiconductor devices, and more particularly to semiconductor devices such as field-effect transistor devices configured for biomolecule sensing. In one aspect, a semiconductor chip comprises at least one field-effect transistor device which comprises a source, a drain, a gate stack and a channel region formed between the source and the drain. The gate stack only partially overlaps the channel region at the source side and/or at the drain side, such that a non-overlapped channel region at the source side and/or at the drain side is formed, where the non-overlapped channel region is configured for sensing biomolecules.
Public/Granted literature
- US20160320336A1 FET BIOSENSOR Public/Granted day:2016-11-03
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