Invention Grant
- Patent Title: MEMS device with piezoelectric actuation, a projective MEMS system including the MEMS device and related control method
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Application No.: US15594287Application Date: 2017-05-12
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Publication No.: US10310253B2Publication Date: 2019-06-04
- Inventor: Roberto Carminati , Domenico Giusti , Sonia Constantini
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102016000131849 20161228
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; G02B26/10 ; H04N9/31

Abstract:
A MEMS device includes a fixed structure and suspended structure including an internal structure and a first arm and a second arm. Each arm has a first end fixed to the fixed structure and a second end fixed to the internal structure. The ends are angularly arranged at a distance apart. Piezoelectric actuators mounted to the arms are driven so as to cause deformation of the arm and produce a rotation of the internal structure. In a resting condition, each of the first and second arms has a respective elongated portion with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.
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