Invention Grant
- Patent Title: Mirror, in particular for a microlithographic projection exposure apparatus
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Application No.: US15018316Application Date: 2016-02-08
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Publication No.: US10310382B2Publication Date: 2019-06-04
- Inventor: Martin Hermann
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102013215541 20130807
- Main IPC: G02B5/08
- IPC: G02B5/08 ; G02B5/20 ; F21V9/04 ; F21V9/06 ; G03F7/20 ; G21K1/06

Abstract:
A mirror (10, 20, 30, 40), more particularly for a microlithographic projection exposure apparatus, has an optical effective surface (10a, 20a, 30a, 40a), a mirror substrate (11, 21, 31, 41) and a reflection layer stack (14, 24, 34, 44) for reflecting electromagnetic radiation impinging on the optical effective surface (10a, 20a, 30a, 40a), wherein a layer (13, 23, 33, 43) composed of a group III nitride is arranged between the mirror substrate (11, 21, 31, 41) and the reflection layer stack (14, 24, 34, 44), wherein the group III nitride is selected from the group containing gallium nitride (GaN), aluminum nitride (AlN) and aluminum gallium nitride (AlGaN).
Public/Granted literature
- US20160154317A1 MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2016-06-02
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