Invention Grant
- Patent Title: Incremental multi-patterning validation
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Application No.: US14996796Application Date: 2016-01-15
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Publication No.: US10311195B2Publication Date: 2019-06-04
- Inventor: Yuli Xue , Weiping Fang , John Robert Studders , Byungwook Kim
- Applicant: Synopsys, Inc.
- Applicant Address: US CA Mountain View
- Assignee: SYNOPSYS, INC.
- Current Assignee: SYNOPSYS, INC.
- Current Assignee Address: US CA Mountain View
- Agency: Alston & Bird LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L21/84 ; G03F1/00

Abstract:
A computer-implemented method for validating a design characterized by a multi-patterning layer is presented. The method includes receiving the multi-patterning layer in a memory of the computer when the computer is invoked to validate the design. The method further includes correcting, using the computer, a first error in a first shape of the multi-patterning layer in accordance with a first rule thereby forming a corrected layer. The method further includes incrementally validating, using the computer, a first portion of the corrected layer in accordance with the first error and a first connected component of a first graph associated with the multi-patterning layer.
Public/Granted literature
- US20170206300A1 INCREMENTAL MULTI-PATTERNING VALIDATION Public/Granted day:2017-07-20
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