Invention Grant
- Patent Title: Apparatus and method of determining a bonding position of a die
-
Application No.: US15611910Application Date: 2017-06-02
-
Publication No.: US10311597B2Publication Date: 2019-06-04
- Inventor: Kui Kam Lam , Shun Ming Fung , Chi Keung Leung , Wing Kin Lam , Yuet Cheung
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: G06T7/73
- IPC: G06T7/73

Abstract:
The invention provides an apparatus for determining a bonding position of a die. The apparatus includes a bond head for picking up and bonding the die. The apparatus further includes a plurality of cameras positioned and configured for capturing at least a first image including a first side surface of the die, a second image including a second side surface of the die and a third image including the first and second side surfaces of the die. Further, the invention provides a method of determining a bonding position of a die. The method captures at least a first image including a first side surface of the die, a second image including a second side surface of the die and a third image including the first and second side surfaces of the die. The method further determines a bonding position of the die based on the captured images.
Public/Granted literature
- US20180350097A1 APPARATUS AND METHOD OF DETERMINING A BONDING POSITION OF A DIE Public/Granted day:2018-12-06
Information query