Invention Grant
- Patent Title: Via formation for cross-point memory
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Application No.: US15280238Application Date: 2016-09-29
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Publication No.: US10311947B2Publication Date: 2019-06-04
- Inventor: Stephen Tang
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: G11C13/00
- IPC: G11C13/00 ; H01L27/10 ; H01L23/48 ; H01L45/00 ; H01L27/24 ; H01L23/528

Abstract:
Embodiments disclosed herein may relate to electrically conductive vias in cross-point memory array devices. In an embodiment, the vias may be formed using a lithographic operation also utilized to form electrically conductive lines in a first electrode layer of the cross-point memory array device.
Public/Granted literature
- US20170069375A1 VIA FORMATION FOR CROSS-POINT MEMORY Public/Granted day:2017-03-09
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