Invention Grant
- Patent Title: Sample chamber device for electron microscope, and electron microscope comprising same
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Application No.: US15576686Application Date: 2016-08-11
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Publication No.: US10312049B2Publication Date: 2019-06-04
- Inventor: Bok Lae Cho , Sang Jung Ahn , Inho Sul
- Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Applicant Address: KR Daejeon
- Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Current Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Current Assignee Address: KR Daejeon
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2015-0117737 20150821
- International Application: PCT/KR2016/008817 WO 20160811
- International Announcement: WO2017/034190 WO 20170302
- Main IPC: H01J37/16
- IPC: H01J37/16 ; H01J37/20 ; H01J37/26 ; G02B21/00 ; G02B21/02 ; G02B21/06 ; G02B21/36 ; H01J37/18 ; H01J37/22 ; H01J37/244 ; H01J37/285

Abstract:
A vacuum sample chamber for a particle and optical device includes on one surface thereof, an aperture through which a particle beam to be focused along an optical axis of particles such as electrons, ions and neutral particles is incident; and on the opposite surface thereof, a detachable sample holder through which light penetrates, thereby enabling a sample to be observed and analyzed by means of the particle beam and light. A sample chamber is capable of reducing observation time by maintaining a vacuum therein even when a sample is put into or taken out from a sample chamber of an electron microscope or focused ion beam observation equipment, and capable of obtaining an optical image on the outside thereof without inserting a light source or an optical barrel into the sample chamber. A light-electron fusion microscope comprising the sample chamber.
Public/Granted literature
- US20180158645A1 SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSCOPE COMPRISING SAME Public/Granted day:2018-06-07
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