Invention Grant
- Patent Title: Diamond air bridge for thermal management of high power devices
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Application No.: US15945803Application Date: 2018-04-05
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Publication No.: US10312175B1Publication Date: 2019-06-04
- Inventor: Karl D. Hobart , Andrew D. Koehler , Francis J. Kub , Travis J. Anderson , Tatyana I. Feygelson , Marko J. Tadjer , Lunet E. Luna
- Applicant: The United States of America, as represented by the Secretary of the Navy
- Applicant Address: US DC Washington
- Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agency: US Naval Research Laboratory
- Agent Joslyn Barritt
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L21/48 ; H01L29/47 ; H01L29/45 ; H01L23/373 ; H01L29/20 ; H01L29/205 ; H01L29/66
Abstract:
A device structure and method for improving thermal management in highly scaled, high power electronic and optoelectronic devices such as GaN FET and AlGaN/GaN HEMT devices by implementing diamond air bridges into such devices to remove waste heat. The diamond air bridge can be formed from a polycrystalline diamond material layer which can be grown on the surface of a dielectric material layer, on the surface of a III-nitride material, or on the surface of a diamond polycrystalline nucleation layer, and may be optimized to have a high thermal conductivity at the growth interface with the underlying material.
Public/Granted literature
- US20190157181A1 Diamond Air Bridge for Thermal Management of High Power Devices Public/Granted day:2019-05-23
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