Invention Grant
- Patent Title: Inductively coupled microelectromechanical system resonator
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Application No.: US15726284Application Date: 2017-10-05
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Publication No.: US10312185B2Publication Date: 2019-06-04
- Inventor: Bichoy Bahr , Baher Haroun , Ali Kiaei
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENT INCORPORATED
- Current Assignee: TEXAS INSTRUMENT INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L23/495
- IPC: H01L23/495 ; B81C1/00 ; G01C19/56 ; H01L23/00 ; B81B7/02 ; B81B7/00

Abstract:
An integrated circuit package includes a first die that has a microelectromechanical system (MEMS) resonator coupled to a coil. A second die includes a coil fabricated on a top surface of the second die, and an electronic circuit with tank circuit terminals fabricated on the second die and coupled to the second coil. The second die is positioned adjacent the first die such that the first coil is operable to electromagnetically couple to the second coil.
Public/Granted literature
- US20190109075A1 Inductively Coupled Microelectromechanical System Resonator Public/Granted day:2019-04-11
Information query
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