Invention Grant
- Patent Title: Semiconductor device and manufacturing method therefor
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Application No.: US15683029Application Date: 2017-08-22
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Publication No.: US10312329B2Publication Date: 2019-06-04
- Inventor: Ming Zhou
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Beijing CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Beijing CN Shanghai
- Agency: Brinks Gilson & Lione
- Priority: CN201610871339 20160930
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/16 ; H01L29/06 ; H01L23/528 ; H01L21/768 ; H01L21/02 ; H01L29/423 ; H01L29/786

Abstract:
The present disclosure relates to the technical field of semiconductor processes, and discloses a semiconductor device and a manufacturing method therefor. The manufacturing method includes: providing a substrate structure including a substrate and a first material layer on the substrate, wherein a recess is formed in the substrate and the first material layer includes a nanowire; forming a base layer on the substrate structure; selectively growing a graphene layer on the base layer; forming a second dielectric layer on the graphene layer; forming an electrode material layer on the substrate structure to cover the second dielectric layer; defining an active region; and forming a gate by etching at least a portion of a stack layer to at least the second dielectric layer so as to form a gate structure surrounding an intermediate portion of the nanowire, where the gate structure includes a portion of the electrode material layer and the second dielectric layer. The present disclosure incorporates graphene into the semiconductor process and makes use of the features of graphene in a dual-gate structure.
Public/Granted literature
- US20180097067A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2018-04-05
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