Invention Grant
- Patent Title: Fin-type semiconductor device
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Application No.: US15893319Application Date: 2018-02-09
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Publication No.: US10312333B2Publication Date: 2019-06-04
- Inventor: Xinyun Xie , Ming Zhou
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Beijing CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Beijing CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201510456885 20150729
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L29/00 ; H01L29/40 ; H01L29/06 ; H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L21/762 ; H01L21/3105 ; H01L21/8234 ; H01L27/02 ; H01L27/088 ; H01L21/00 ; H01L23/367 ; H01L21/306 ; H01L21/3065 ; H01L21/308

Abstract:
Fin-type semiconductor device is provided. The semiconductor device includes: a semiconductor substrate and an insulating layer on sidewalls of the plurality of fins. A plurality of fins is projected on a surface of the semiconductor substrate. The insulating layer is located on the surface of the semiconductor substrate. A surface of the insulating layer is lower than top surfaces of the plurality of fins. A thermal conductivity of the insulating layer is larger than a thermal conductivity of silicon oxide.
Public/Granted literature
- US20180175151A1 FIN-TYPE SEMICONDUCTOR DEVICE Public/Granted day:2018-06-21
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