Invention Grant
- Patent Title: Transistor having a gate with a variable work function and method for manufacturing the same
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Application No.: US15871690Application Date: 2018-01-15
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Publication No.: US10312345B2Publication Date: 2019-06-04
- Inventor: Jinjuan Xiang , Xiaolei Wang , Hong Yang , Shi Liu , Junfeng Li , Wenwu Wang , Chao Zhao
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: CN201710233040 20170411
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L29/66 ; H01L21/265 ; H01L29/49

Abstract:
The present disclosure provides a method for manufacturing a transistor having a gate with a variable work function, comprising: providing a semiconductor substrate; forming a dummy gate stack on the semiconductor substrate and performing ion implantation on an exposed area of the semiconductor substrate at both sides of the dummy gate stack to form source/drain regions; removing the dummy gate and annealing the source/drain regions; providing an atomic layer deposition reaction device; introducing a precursor source reactant into the atomic layer deposition reaction device; and controlling an environmental factor for the atomic layer deposition device to grow a work function metal layer. The present disclosure also provides a transistor having a gate with a variable work function. The present disclosure may adjust a variable work function, and may use the same material system to obtain an adjustable threshold voltage within an adjustable range.
Public/Granted literature
- US20180294342A1 TRANSISTOR HAVING A GATE WITH A VARIABLE WORK FUNCTION AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2018-10-11
Information query
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