Invention Grant
- Patent Title: Reducing resistance of bottom source/drain in vertical channel devices
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Application No.: US15980789Application Date: 2018-05-16
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Publication No.: US10312349B2Publication Date: 2019-06-04
- Inventor: Shogo Mochizuki , Junli Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Garg Law Firm, PLLC
- Agent Grant Johnson
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8238 ; H01L29/45 ; H01L29/78

Abstract:
During a fabrication of a semiconductor device, a recess is created in a substrate material disposed along a direction of a plane of fabrication. A layer of a removable material is formed in the recess. A bottom layer is formed above the layer of removable material. A vertical channel above the bottom layer is formed in a direction substantially orthogonal to the direction of the plane of fabrication. A gate is formed using a metal above the bottom layer and relative to the vertical channel. A tunnel is created under the bottom layer by removing the removable material from under the bottom layer such that the backside of the bottom layer forms a ceiling of the tunnel. The tunnel is filled using a conductive material such that the conductive material makes electrical contact with the backside of the bottom layer.
Public/Granted literature
- US20180269310A1 REDUCING RESISTANCE OF BOTTOM SOURCE/DRAIN IN VERTICAL CHANNEL DEVICES Public/Granted day:2018-09-20
Information query
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