Invention Grant
- Patent Title: Piezoelectric device
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Application No.: US15173810Application Date: 2016-06-06
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Publication No.: US10312427B2Publication Date: 2019-06-04
- Inventor: Keiichi Umeda , Toshio Imanishi , Ville Kaajakari
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H01L41/047 ; H04R17/02 ; H04R19/01 ; H01L41/187

Abstract:
A piezoelectric device that includes: a diaphragm; a supporting part configured to support at least a portion of an end of the diaphragm; a piezoelectric film disposed along a portion supported by the supporting part on the diaphragm, a width of the film along the supported portion being narrower than a width of the portion; a lower electrode disposed at a face of the piezoelectric film on a diaphragm side; and an upper electrode disposed on a face of the piezoelectric film on an opposite side to the diaphragm.
Public/Granted literature
- US20160284974A1 PIEZOELECTRIC DEVICE Public/Granted day:2016-09-29
Information query
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