Invention Grant
- Patent Title: Deposition of integrated computational elements (ICE) using a translation stage
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Application No.: US15303653Application Date: 2014-06-30
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Publication No.: US10316405B2Publication Date: 2019-06-11
- Inventor: David L. Perkins , Robert Paul Freese , Christopher Michael Jones , Richard Neal Gardner
- Applicant: Halliburton Energy Services, Inc.
- Applicant Address: US TX Houston
- Assignee: Halliburton Energy Services, Inc.
- Current Assignee: Halliburton Energy Services, Inc.
- Current Assignee Address: US TX Houston
- Agency: Chamberlain Hrdlicka
- International Application: PCT/US2014/044818 WO 20140630
- International Announcement: WO2016/003401 WO 20160107
- Main IPC: G02B5/28
- IPC: G02B5/28 ; C23C14/30 ; C23C14/50 ; C23C14/54 ; E21B47/12 ; G01B11/06

Abstract:
The disclosed embodiments include a system and method for manufacturing an integrated computational element (ICE) core. The method comprises varying a distance between a thermal component relative to a substrate holder that holds at least one substrate during a thin film deposition process to improve uniformity of the ICE core. In one embodiment, varying the distance between the thermal component relative to the substrate holder that holds at least one substrate includes moving at least a portion of the substrate holder in at least one direction relative to the thermal component and also moving the thermal component in at least one direction relative to the substrate holder during the thin film deposition process.
Public/Granted literature
- US20170029939A1 Deposition of Integrated Computational Elements (ICE) Using a Translation Stage Public/Granted day:2017-02-02
Information query