Invention Grant
- Patent Title: Wafter carrier for chemical vapor deposition systems
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Application No.: US13450062Application Date: 2012-04-18
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Publication No.: US10316412B2Publication Date: 2019-06-11
- Inventor: Sandeep Krishnan , Jeffrey Scott Montgomery , Lukas Urban , Alexander I. Gurary , Yuliy Rashkovsky
- Applicant: Sandeep Krishnan , Jeffrey Scott Montgomery , Lukas Urban , Alexander I. Gurary , Yuliy Rashkovsky
- Applicant Address: US NY Plainview
- Assignee: Veeco Instruments Inc.
- Current Assignee: Veeco Instruments Inc.
- Current Assignee Address: US NY Plainview
- Agency: Patterson Thuente Pedersen, P.A.
- Main IPC: C23C16/458
- IPC: C23C16/458 ; H01L21/687

Abstract:
A wafer carrier for use in a system for growing epitaxial layers on one or more wafers by chemical vapor deposition. The wafer carrier includes wafer retention pockets recessed in its body. Each pocket includes a floor surface and a peripheral wall surface surrounding the floor surface and defining a periphery of that pocket. Each pocket has a center situated along a corresponding wafer carrier radial axis. In each of the pockets, a set of bumpers is positioned primarily at a distal portion of the wafer retention pocket opposite the central axis so as to maintain a gap of at least a predefined size between the peripheral wall surface at the distal portion and an edge of a wafer to be placed in the wafer retention pocket.
Public/Granted literature
- US20130276704A1 WAFTER CARRIER FOR CHEMICAL VAPOR DEPOSITION SYSTEMS Public/Granted day:2013-10-24
Information query
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