Vibration measurement device
Abstract:
A vibration measurement device includes: a vibration-inducing section; a laser source; a scanning section for illuminating a partial area of a measurement area on an object with laser light and moving the illumination area; an illumination control section for sequentially illuminating each point within the measurement area with an illuminating duration equal to or shorter than one third of the vibration period; a displacement measurement section for measuring, for each point within the measurement area, an interfering light obtained by splitting an object light from the object into two bundles of light to measure a relative displacement in a back-and-forth direction between two closely-located points within the measurement area; and a vibration state determination section for determining the state of vibration of the entire measurement area, based on the relative displacement in the back-and-forth direction between two closely-located points at each point within the measurement area.
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