Invention Grant
- Patent Title: Vibration measurement device
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Application No.: US15938591Application Date: 2018-03-28
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Publication No.: US10317190B2Publication Date: 2019-06-11
- Inventor: Takahide Hatahori , Yuya Nagata , Kenji Takubo
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Sughrue Mion, PLLC
- Priority: JP2017-064905 20170329
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01M7/02 ; G01B11/24 ; G01N21/17 ; G01N21/45 ; G01N21/88 ; G01N29/00

Abstract:
A vibration measurement device includes: a vibration-inducing section; a laser source; a scanning section for illuminating a partial area of a measurement area on an object with laser light and moving the illumination area; an illumination control section for sequentially illuminating each point within the measurement area with an illuminating duration equal to or shorter than one third of the vibration period; a displacement measurement section for measuring, for each point within the measurement area, an interfering light obtained by splitting an object light from the object into two bundles of light to measure a relative displacement in a back-and-forth direction between two closely-located points within the measurement area; and a vibration state determination section for determining the state of vibration of the entire measurement area, based on the relative displacement in the back-and-forth direction between two closely-located points at each point within the measurement area.
Public/Granted literature
- US20180283847A1 VIBRATION MEASUREMENT DEVICE Public/Granted day:2018-10-04
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