Invention Grant
- Patent Title: Adapter for replaceable lamp
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Application No.: US15921281Application Date: 2018-03-14
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Publication No.: US10319579B2Publication Date: 2019-06-11
- Inventor: Joseph M. Ranish , Oleg V. Serebryanov
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G02B27/10
- IPC: G02B27/10 ; G01B11/25 ; G02B5/18 ; H01K1/46 ; H01K1/36 ; H01K1/66 ; H05B3/00 ; H01K1/44

Abstract:
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal coupling to the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
Public/Granted literature
- US20180204715A1 ADAPTER FOR REPLACEABLE LAMP Public/Granted day:2018-07-19
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