Invention Grant
- Patent Title: Conveyance hand, conveyance apparatus, lithography apparatus, manufacturing method of article, and holding mechanism
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Application No.: US15976436Application Date: 2018-05-10
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Publication No.: US10319623B2Publication Date: 2019-06-11
- Inventor: Yasunao Matsuhira
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2017-107066 20170530
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B25J15/06 ; H01L21/677 ; G03F7/20 ; H01L21/687
Abstract:
A conveyance hand for holding a conveyed object can include a base, a pad configured to suction the conveyed object, and a first support member fixed to the base and configured to support the pad. First support member can include three or more support members each configured to support the pad.
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Information query
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