Invention Grant
- Patent Title: Electrode for a metal-insulator-metal structure, capacitor of metal-insulator-metal type, and method for fabricating one such electrode and one such capacitor
-
Application No.: US15220869Application Date: 2016-07-27
-
Publication No.: US10319806B2Publication Date: 2019-06-11
- Inventor: Guillaume Rodriguez , Aomar Halimaoui , Laurent Ortiz
- Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , STMICROELECTRONICS (CROLLES 2) SAS
- Applicant Address: FR Paris FR Crolles
- Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee Address: FR Paris FR Crolles
- Agency: Oliff PLC
- Priority: FR1557206 20150728
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L49/02
Abstract:
The electrode for a structure of Metal-Insulator-Metal type is formed by a stack successively comprising a gold layer, a barrier layer made from electrically conducting oxide and a platinum layer.The electrically conducting oxide is advantageously a noble metal oxide, and preferentially ruthenium oxide.The electrode is arranged on a substrate. The gold layer of the electrode is separated from the substrate by an adhesion layer made from titanium dioxide.The electrode is used to fabricate a capacitor of Metal-Insulator-Metal type.
Public/Granted literature
Information query
IPC分类:
