Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15171181Application Date: 2016-06-02
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Publication No.: US10320362B2Publication Date: 2019-06-11
- Inventor: Taku Kikuchi , Shin Saijo , Hisashi Yamazaki , Masahiro Fukushima , Yuji Miwa
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2013-272566 20131227; JP2014-191050 20140919
- Main IPC: H03H9/05
- IPC: H03H9/05 ; H03H3/08 ; H03H9/10 ; H01L41/047 ; H03H9/145

Abstract:
An elastic wave device includes a multilayer film provided on a support substrate and including a piezoelectric thin film and a layer other than the piezoelectric thin film, an interdigital transducer electrode provided on one surface of the piezoelectric thin film, and an external connection terminal electrically connected to the interdigital transducer electrode. In a plan view, the multilayer film is partially absent or omitted in a region outside a region where the interdigital transducer electrode is provided, and the elastic wave device further includes a first insulating layer provided on the support substrate in at least a portion of a region where the multilayer film is absent or omitted.
Public/Granted literature
- US20160277003A1 ELASTIC WAVE DEVICE Public/Granted day:2016-09-22
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