Invention Grant
- Patent Title: Dynamic-magnetic steel magnet levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission
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Application No.: US16069198Application Date: 2016-08-31
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Publication No.: US10331044B2Publication Date: 2019-06-25
- Inventor: Yongmeng Liu , Jianwei Wu , Jiubin Tan
- Applicant: HARBIN INSTITUTE OF TECHNOLOGY
- Applicant Address: CN Harbin
- Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee Address: CN Harbin
- Agency: IPro, PLLC
- Agent Na Xu
- Priority: CN201610023022 20160114
- International Application: PCT/CN2016/097501 WO 20160831
- International Announcement: WO2017/121126 WO 20170720
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/02

Abstract:
A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology. The apparatus comprises a support frame (1), a balance mass block (2), magnetic levitation workpiece stages (4a, 4b), a workpiece stage measurement apparatus, wireless energy transmission apparatuses (5a, 5b) and a wireless energy receiving apparatus (406), wherein the two workpiece stages work between a measurement site (11) and an exposure site (12); a laser interferometer (6) is used to measure the positions of the workpiece stages; the wireless energy transmission apparatuses (5a, 5b) are used to provide energy for a sensor (407) in a micro-drive stage; the workpiece stages are driven using a magnetic levitation planar electrical motor; and during a double-workpiece-stage switching process, the planar electrical motor is used to drive the two workpiece stages so as to achieve single-beat arc quick switching. By using the method and apparatus, the problem that an existing stage switching scheme has many beats, a long track, many start-stop links and a long time for stabilization is solved, thereby reducing the stage switching links, shortening the stage switching time, and improving the productivity of a lithography machine.
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