Invention Grant
- Patent Title: Substrate processing apparatus
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Application No.: US15019246Application Date: 2016-02-09
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Publication No.: US10332761B2Publication Date: 2019-06-25
- Inventor: Kenji Kobayashi , Jun Sawashima , Yuta Nishimura , Akito Hatano , Motoyuki Shimai , Toyohide Hayashi
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2015-29843 20150218; JP2015-35519 20150225; JP2015-35520 20150225; JP2015-35521 20150225; JP2015-64802 20150326
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A supply flow passage branches into a plurality of upstream flow passages. The plurality of upstream flow passages include a branching upstream flow passage that branches into a plurality of downstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis and discharge processing liquids, supplied via the plurality of upstream flow passages, toward an upper surface of a substrate held by a substrate holding unit.
Public/Granted literature
- US20160240413A1 SUBSTRATE PROCESSING APPARATUS Public/Granted day:2016-08-18
Information query
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