Invention Grant
- Patent Title: Lamp driver for low pressure environment
-
Application No.: US14987378Application Date: 2016-01-04
-
Publication No.: US10332763B2Publication Date: 2019-06-25
- Inventor: Oleg V. Serebryanov , Alexander Goldin , Joseph M. Ranish
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INCL
- Current Assignee: APPLIED MATERIALS, INCL
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H05B3/02
- IPC: H05B3/02 ; H01L21/67 ; F27B17/00 ; F26B3/30

Abstract:
Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.
Public/Granted literature
- US20160196992A1 LAMP DRIVER FOR LOW PRESSURE ENVIRONMENT Public/Granted day:2016-07-07
Information query