Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US15460551Application Date: 2017-03-16
-
Publication No.: US10332905B2Publication Date: 2019-06-25
- Inventor: Shinya Naito , Osamu Fujii , Takayuki Kakegawa
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157

Abstract:
A semiconductor memory device includes a conductive layer; a plurality of electrode layers stacked on the conductive layer; a semiconductor pillar extending through the electrode layers in a stacking direction and electrically connected to the conductive layer; and an insulating layer positioned between the semiconductor pillar and the electrode layers and extending along the semiconductor pillar. The semiconductor pillar has a channel portion extending through the electrode layers and a high impurity concentration portion positioned at a bottom end on a side of the conductive layer. The high impurity concentration portion includes an impurity of a higher concentration than an impurity concentration in the channel portion. The insulating layer has an end portion extending toward a center of the bottom end of the semiconductor pillar, and a boundary of the channel portion and the high impurity concentration portion is positioned above the end portion of the insulating layer.
Public/Granted literature
- US20180083102A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-03-22
Information query
IPC分类: